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Characterization of surface relief gratings of submicron period

Author(s):
P. C. Logoff ( National Institute for Lasers, Plasma and Radiation Physics (Romania) )
D. Apostol ( National Institute for Lasers, Plasma and Radiation Physics (Romania) )
M. Castex ( Lab. de Physique des Lasers, Univ. Paris-Nord (France) )
I. Apostol ( National Institute for Lasers, Plasma and Radiation Physics (Romania) )
V. Damian ( National Institute for Lasers, Plasma and Radiation Physics (Romania) )
I. Iordache ( National Institute for Lasers, Plasma and Radiation Physics (Romania) )
R. Muller ( National Institute in Microtechnologies (Romania) )
2 more
Publication title:
ROMOPTO 2006 : eighth conference on optics : 4-7 September 2006, Sibiu, Romania
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6785
Pub. Year:
2007
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819469496 [0819469491]
Language:
English
Call no.:
P63600/6785
Type:
Conference Proceedings

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