Auto-scanning white-light interferometer

Auto-scanning white-light interferometer

Author(s):

J.-L. Chen ( Industrial Technology Research Institute (Taiwan) )
C.-H. Tung ( Mingdao Univ. (Taiwan) )
C.-F. Kao ( Mingdao Univ. (Taiwan) )
C. C. Chang ( Industrial Technology Research Institute (Taiwan) )

Publication title:

Advanced characterization techniques for optics, semiconductors, and nanotechnologies III : 28-29 August 2007, San Diego, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6672

Pub. Year:

2007

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819468208 [0819468207]

Language:

English

Call no.:

P63600/6672

Type:

Conference Proceedings

Details

TDL ID:	ZA00046955
Series ID:	PA00000029
Conf. info. (Name):	SPIE Optical Engineering and Applications : Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies
Conf. info. (Number):	2007 : 3rd
Conf. info. (Venue):	San Diego, California, USA
Conf. info. (Date):	2007.08.28-2007.08.29

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