A CAD integration framework for designing devices with atomic scale resolution

A CAD integration framework for designing devices with atomic scale resolution

Author(s):

Y.-C. Chang ( Stanford Univ. (USA) )
K. Ramaswami ( Indian Institute of Science (India) )
M. Pinilla ( Navis, LLC (USA) )
S. Walch ( Stanford Univ. (USA) )
F. Prinz ( Stanford Univ. (USA) )

Publication title:

Instrumentation, metrology, and standards for nanomanufacturing : 29-30 August 2007, San Diego, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6648

Pub. Year:

2007

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819467966 [0819467960]

Language:

English

Call no.:

P63600/6648

Type:

Conference Proceedings

Details

TDL ID:	ZA00046944
Series ID:	PA00000029
Conf. info. (Name):	SPIE NanoScience and Engineering : Instrumentation, Metrology, and Standards for Nanomanufacturing
Conf. info. (Number):	2007
Conf. info. (Venue):	San Diego, California, USA
Conf. info. (Date):	2007.08.29-2007.08.30

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