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The helium ion microscope: a new tool for nanomanufacturing

Author(s):
M. T. Postek ( National Institute of Standards and Technology (USA) )
A. E. Vladar ( National Institute of Standards and Technology (USA) )
J. Kramar ( National Institute of Standards and Technology (USA) )
L. A. Stern ( ALIS /Zeiss Corp. (USA) )
J. Notte ( ALIS /Zeiss Corp. (USA) )
S. McVey ( ALIS /Zeiss Corp. (USA) )
1 more
Publication title:
Instrumentation, metrology, and standards for nanomanufacturing : 29-30 August 2007, San Diego, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6648
Pub. Year:
2007
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819467966 [0819467960]
Language:
English
Call no.:
P63600/6648
Type:
Conference Proceedings

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