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Thermal annealing of birefringent TiO2 thin films formed by oblique-angle deposition

Author(s):
Publication title:
Nanocoatings : 26-27 August 2007, San Diego, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6647
Pub. Year:
2007
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819467959 [0819467952]
Language:
English
Call no.:
P63600/6647
Type:
Conference Proceedings

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