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Micro-opto-electro-mechanical system (MOEMS) for microstructure manipulation and optical characterization

Author(s):
Publication title:
Nanoengineering : fabrication, properties, optics, and devices IV : 27-30 August 2007, San Diego, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6645
Pub. Year:
2007
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819467935 [0819467936]
Language:
English
Call no.:
P63600/6645
Type:
Conference Proceedings

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