Model-based analysis of the limits of optical metrology with experimental comparisons

Author(s):

• R. M. Silver ( National Institute of Standards and Technology (USA) )
• R. Attota ( National Institute of Standards and Technology (USA) )
• E. Marx ( National Institute of Standards and Technology (USA) )

Publication title:

Modeling aspects in optical metrology : 18-19 June 2007, Munich, Germany

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6617

Pub. Year:

2007

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819467591 [0819467596]

Language:

English

Call no.:

P63600/6617

Type:

Conference Proceedings