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3D simulations of electromagnetic fields in nanostructures using the time-harmonic finite-element method

Author(s):
S. Burger ( Zuse Institute Berlin (Germany) and JCMwave GmbH (Germany) )
L. Zschiedrich ( Zuse Institute Berlin (Germany) and JCMwave GmbH (Germany) )
F. Schmidt ( Zuse Institute Berlin (Germany) and JCMwave GmbH (Germany) )
R. Koehle ( Qimonda AG (Germany) )
T. Henkel ( Qimonda Dresden GmbH & Co (Germany) )
B. Kuechler ( Qimonda Dresden GmbH & Co (Germany) )
C. Noelscher ( Qimonda Dresden GmbH & Co (Germany) )
2 more
Publication title:
Modeling aspects in optical metrology : 18-19 June 2007, Munich, Germany
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6617
Pub. Year:
2007
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819467591 [0819467596]
Language:
English
Call no.:
P63600/6617
Type:
Conference Proceedings

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