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Measuring 3D geometries of microstructures with the laser-scanning confocal vibrometer microscope

Author(s):
Publication title:
Optical Measurement Systems for Industrial Inspection V
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6616
Pub. Year:
2007
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819467584 [0819467588]
Language:
English
Call no.:
P63600/6616
Type:
Conference Proceedings

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