Differential signal scatterometry overlay metrology: an accuracy investigation

Differential signal scatterometry overlay metrology: an accuracy investigation

Author(s):

D. Kandel ( KLA-Tencor Corp. (Israel) )

M. Adel ( KLA-Tencor Corp. (Israel) )

B. Dinu ( KLA-Tencor Corp. (Israel) )

B. Golovanevsky ( KLA-Tencor Corp. (Israel) )

P. Izikson ( KLA-Tencor Corp. (Israel) )

V. Levinski ( KLA-Tencor Corp. (Israel) )

I. Vakshtein ( KLA-Tencor Corp. (Israel) )

P. Leray ( IMEC (Belgium) )

M. Vasconi ( STMicroelectronics (Italy) )

B. Salski ( QWED Sp. z.o.o. (Poland) )

5 more

Publication title:

Optical Measurement Systems for Industrial Inspection V

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6616

Pub. Year:

2007

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819467584 [0819467588]

Language:

English

Call no.:

P63600/6616

Type:

Conference Proceedings

Details

TDL ID:	ZA00046923
Series ID:	PA00000029
Conf. info. (Name):	Optical Metrology : Optical Measurement Systems for Industrial Inspection
Conf. info. (Number):	2007 : 5th
Conf. info. (Venue):	Munich, Germany
Conf. info. (Date):	2007.06.18-2007.06.22

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