Interferometric testing of aspheric components for EUV reduced camera
- Author(s):
- E. Gavrilov ( S.O.I. Vavilov State Optical Institute (Russia) )
- V. Kirillovsky ( S.O.I. Vavilov State Optical Institute (Russia) )
- P. Orlov ( S.O.I. Vavilov State Optical Institute (Russia) )
- N. Voznesensky ( S.O.I. Vavilov State Optical Institute (Russia) )
- A. Zhevlakov ( S.O.I. Vavilov State Optical Institute (Russia) )
- Publication title:
- Laser optics 2006 : high-power gas lasers : 26-30 June 2006, St. Petersburg, Russia
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6611
- Pub. Year:
- 2007
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819467522 [0819467529]
- Language:
- English
- Call no.:
- P63600/6611
- Type:
- Conference Proceedings
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