Discharge produced plasma source for EUV lithography

Discharge produced plasma source for EUV lithography

Author(s):

V. Borisov ( Troitsk Institute for Innovation and Fusion Research (Russia) )

A. Eltzov ( Troitsk Institute for Innovation and Fusion Research (Russia) )

A. Ivanov ( Troitsk Institute for Innovation and Fusion Research (Russia) )

O. Khristoforov ( Troitsk Institute for Innovation and Fusion Research (Russia) )

Yu. Kirykhin ( Troitsk Institute for Innovation and Fusion Research (Russia) )

A. Vinokhodov ( Troitsk Institute for Innovation and Fusion Research (Russia) )

V. Vodchits ( Troitsk Institute for Innovation and Fusion Research (Russia) )

V. Mishhenko ( Troitsk Institute for Innovation and Fusion Research (Russia) )

A. Prokofiev ( Troitsk Institute for Innovation and Fusion Research (Russia) )

4 more

Publication title:

Laser optics 2006 : high-power gas lasers : 26-30 June 2006, St. Petersburg, Russia

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6611

Pub. Year:

2007

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819467522 [0819467529]

Language:

English

Call no.:

P63600/6611

Type:

Conference Proceedings

Details

TDL ID:	ZA00046918
Series ID:	PA00000029
Conf. info. (Name):	Laser Optics
Conf. info. (Number):	2006
Conf. info. (Venue):	St. Petersburg, Russia
Conf. info. (Date):	2006.06.26-2006.06.30

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