Distributed and adaptive fracturing for sub-90 nm MDP

Distributed and adaptive fracturing for sub-90 nm MDP

Author(s):

R. Pai ( SoftJin Technologies Pvt. Ltd. (India) )

M. Pereira ( SoftJin Technologies Pvt. Ltd. (India) )

N. Rao ( SoftJin Technologies Pvt. Ltd. (India) )

C. S. Manu ( SoftJin Technologies Pvt. Ltd. (India) )

D. S. S. Bhardwaj ( SoftJin Technologies Pvt. Ltd. (India) )

S. Dutta ( SoftJin Technologies Pvt. Ltd. (India) )

1 more

Publication title:

Photomask and next-generation lithography mask technology XIV

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6607

Pub. Year:

2007

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819467454 [0819467456]

Language:

English

Call no.:

P63600/6607

Type:

Conference Proceedings

Details

TDL ID:	ZA00046914
Series ID:	PA00000029
Conf. info. (Name):	Photomask and Next-Generation Lithography Mask Technology
Conf. info. (Number):	2007 : 14th
Conf. info. (Venue):	Yokohama, Japan
Conf. info. (Date):	2007.04.17-2007.04.19

Similar Items:

1 Conference Proceedings Layout and EB data reduction: comparison of OASIS based approach with format-specific reversible compressions R. Pai, M. Pereira, C. S. Manu, A. Parchuri, B. Baruah SPIE - The International Society of Optical Engineering	7 Conference Proceedings Test of a new sub-90-nm DR overlay mark for DRAM production Gruss, S., Teipel, A., Fuelber, C., Kassel, E., Adel, M., Ghinovker, M., Izikson, P. SPIE - The International Society of Optical Engineering
2 Conference Proceedings Vibration control of a cantilever beam using distributed PVDF actuator Pereira, D., Shankar, V.N., Sathiyanarayanan, S., Rao, C.L., Sivakumar, S.M. SPIE - The International Society of Optical Engineering	8 Conference Proceedings High-performance 193-nm photoresist materials based on ROMA polymers: sub-90-nm contact hole application with resist reflow Joo, H.S., Seo, D.C., Kim, C.M., Lim, Y.T., Cho, S.D., Lee, J.B., Song, J.Y., Kim, K.M., Park, J.H., Jung, J.C., Shin, … SPIE - The International Society of Optical Engineering
3 Conference Proceedings Manufacturability of the X Architecture at the 90-nm technology node Smayling, M.C., Sarma, R.C., Nagata, T., Arora, N., Duane, M.P., Oemardani, S., Shah, S. SPIE - The International Society of Optical Engineering	9 Conference Proceedings Adaptive sensor data fusion architecture for land mine detection and discrimination Agarwal,S., Mereddy,P., Shah,D., Dutta,A., Rao,V.S., Baumgart,C.W. SPIE - The International Society for Optical Engineering
4 Conference Proceedings Evaluation of the Processing Conditions in the Transesterification for Biodiesel Production Using the Nanomagnetic Catalyst … J. Dantas, F.N. da Silva, K.R. de Oliveira Pereira, A.S. Silva, A.C.F.d.M. Costa Trans Tech Publications	10 Conference Proceedings Synthesis of Magnetic Nanoparticles Ni_0.5Zn_0.5Fe₂O₄ and … K.R.O. Pereira, J. Dantas, A.S. Silva, D.C. Barbosa, S.M.P. Meneghetti Trans Tech Publications
5 Conference Proceedings Characterization of Al₂O₃-Al₂TiO₂ Ceramic Composites: Effects of Sintering Parameters on the Properties M.F.R. Pais Alves, C.M.F.A. Cossu, R.d.O. Magnago, A.S. Ramos, C. dos Santos Trans Tech Publications	11 Conference Proceedings Specifications, methodologies, and results of evaluation of optical critical dimension scatterometer tools at the 90nm CMOS technology node and beyond Ko, C.-H., Ku, Y., Smith, N., Shyu, D.-M., Wang, S.-C., Lu, S.-H. SPIE - The International Society of Optical Engineering
6 Conference Proceedings Improved performance and stability of Au-doped YBa₂Cu₃O_7-δ thin films for microwave devices M.S.R. Rao, P.R. Apte, S.P. Pai, K.I. Gnanasekar, R. Pinto Society of Photo-optical Instrumentation Engineers	12 Conference Proceedings Critical failure ORC: application to the 90-nm and 65-nm nodes Belledent, J., Shang, S.D., Trouiller, Y., Miramond, C., Patterson, K., Toublan, O.R., Couderc, C., Sundermann, F., … SPIE - The International Society of Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12