Blank Cover Image

Study of heating effect on CAR in electron-beam mask writing

Author(s):
T. Kamikubo ( NuFlare Technology Inc. (Japan) )
M. Hiramoto ( NuFlare Technology Inc. (Japan) )
J. Yashima ( NuFlare Technology Inc. (Japan) )
M. Takahashi ( NuFlare Technology Inc. (Japan) )
R. Nishimura ( NuFlare Technology Inc. (Japan) )
T. Katsumata ( NuFlare Technology Inc. (Japan) )
H. Anze ( NuFlare Technology Inc. (Japan) )
H. Sunaoshi ( NuFlare Technology Inc. (Japan) )
S. Tamamushi ( NuFlare Technology Inc. (Japan) )
M. Ogasawara ( Toshiba Corp. (Japan) )
5 more
Publication title:
Photomask and next-generation lithography mask technology XIV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6607
Pub. Year:
2007
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819467454 [0819467456]
Language:
English
Call no.:
P63600/6607
Type:
Conference Proceedings

Similar Items:

S. Yoshitake, H. Sunaoshi, J. Yashima, S. Tamamushi, M. Ogasawara

Society of Photo-optical Instrumentation Engineers

N. Nakayamada, S. Wake, T. Kamikubo, H. Sunaoshi, S. Tamamushi

Society of Photo-optical Instrumentation Engineers

Sunaoshi, H., Tachikawa, Y., Higurashi, H., Iijima, T., Suzuki, J., Kamikubo, T., Ohtoshi, K., Anze, H., Katsumata, T., …

SPIE - The International Society of Optical Engineering

H. Anze, S. Yamasaki, S. Tamamushi, Y. Ogawa, E. Murakami

Society of Photo-optical Instrumentation Engineers

J. Yashima, K. Ohtoshi, N. Nakayamada, H. Anze, T. Katsumata, T. Iijima, R. Nishimura, S. Fukutome, N. Miyamoto, S. …

SPIE - The International Society of Optical Engineering

Sakurai, H., Abe, T., Itoh, M., Kumagae, A., Anze, H., Higashikawa, I.

SPIE - The International Society of Optical Engineering

H. Sunaoshi, T. Kamikubo, R. Nishimura, K. Tsuruta, T. Katsumata

Society of Photo-optical Instrumentation Engineers

Nishimura,S., Ogasawara,M., Tojo,T.

SPIE-The International Society for Optical Engineering

Ohtoshi,K., Sunaoshi,H., Takamatsu,J., Okabe,F., Ishibashi,K., Yoshitake,S., Yamada,H., Tamamushi,S., Anze,H., …

SPIE-The International Society for Optical Engineering

Sunaoshi,H., Ogasawara,M., Takamatsu,J., Shimomura,N.

SPIE - The International Society for Optical Engineering

Tojo, T., Yoshikawa, R., Ogawa, Y., Tamamushi, S., Hattori, Y., Koikari, S., Kusakabe, H., Abe, T., Ogasawara, M., …

SPIE - The International Society of Optical Engineering

Takamatsu,J., Shimomura,N., Sunaoshi,H., Hattori,K., Ogasawara,M., Nakasugi,T.

SPIE - The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12