Real-time trace ambient ammonia monitor for haze prevention

Real-time trace ambient ammonia monitor for haze prevention

Author(s):

K. Nishimura ( Horiba Ltd. (Japan) )
Y. Sakaguchi ( Horiba Ltd. (Japan) )
E. Crosson ( Picarro, Inc. (USA) )
E. Wahl ( Picarro, Inc. (USA) )
C. Rella ( Picarro, Inc. (USA) )

Publication title:

Photomask and next-generation lithography mask technology XIV

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6607

Pub. Year:

2007

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819467454 [0819467456]

Language:

English

Call no.:

P63600/6607

Type:

Conference Proceedings

Details

TDL ID:	ZA00046914
Series ID:	PA00000029
Conf. info. (Name):	Photomask and Next-Generation Lithography Mask Technology
Conf. info. (Number):	2007 : 14th
Conf. info. (Venue):	Yokohama, Japan
Conf. info. (Date):	2007.04.17-2007.04.19

Similar Items:

1 Conference Proceedings Real-time ultra-sensitive ambient ammonia monitor for advanced lithography [6349-101] Crosson, E., Nishimura, K., Sakaguchi, Y., Rella, C. W., Wahl, E. SPIE - The International Society of Optical Engineering	7 Conference Proceedings Real-time monitoring of BTEX in air via ambient-pressure MPI Swenson,O.F., Carriere,J.P., Isensee,H., Gillispie,G.D., Cooper,W.F., Dvorak,M.A. SPIE-The International Society for Optical Engineering
2 Conference Proceedings Moving solid state cyan lasers beyond 20 mW Knippels, G.M.H., Koulikov, S., Kharlamov, B., Vacca, G., Rella, C.W., Richman, B.A., Kachanov, A.A., Tan, S., Wahl, … SPIE - The International Society of Optical Engineering	8 Conference Proceedings Real-time monitoring based on comprehensive analysis of the haze environment under the pellicle film [6349-54] Choi, J., Lee, S., Kim, E., Nam, I., Cha, B., Choi, S., Han, W. SPIE - The International Society of Optical Engineering
3 Conference Proceedings Comparison of algorithms for use in real-time spotlight-mode SAR image formation Jakowatz, C.V., Jr., Wahl, D.E., Yocky, D.A., Bray, B.K., Bow, W.J., Jr., Richards, J.A. SPIE - The International Society of Optical Engineering	9 Conference Proceedings (233aa) Real-Time Monitoring and Ejection of Out-of-Spec Tablets Via NIR Chemical Imaging Patrick R. Wahl, Gregor Hauseder, Stephan Sacher, Matthias Kerschhaggl, Johannes G. Khinast American Institute of Chemical Engineers
4 Conference Proceedings Real-time monitoring of the all-optical poling in polymers Apostoluk, A., Sahraoui, B., Gadret, G., Fiorini, C., Raimond, P., Lee, K.-S., Andraud, C., Lemercier, G., Alexandre, … SPIE-The International Society for Optical Engineering	10 Conference Proceedings (233aa) Real-Time Monitoring and Ejection of out-of-Spec Tablets Via NIR Chemical Imaging Patrick R. Wahl, Gregor Hauseder, Stephan Sacher, Matthias Kerschhaggl, Johannes G. Khinast American Institute of Chemical Engineers
5 Conference Proceedings CFHT's SkyProbe: a real-time sky-transparency monitor Cuillandre, J.-C., Magnier, E. A., Isani, S., Sabin, D., Knight, W., Kras, S., Lai, K. SPIE-The International Society for Optical Engineering	11 Conference Proceedings Real-time air quality monitoring by using internet video surveillance camera C. J. Wong, H. S. Lim, M. Z. MatJafri, K. Abdullah, K. L. Low SPIE - The International Society of Optical Engineering
6 Conference Proceedings Real-Time Monitoring of Semiconductor Growth by Spectroscopic Ellipsometry Johs, B., Hale, J., Herzinger, C., Doctor, D., Elliott, K., Olson, G., Chow, D., Roth, J., Ferguson, I., Pelczynski, M., … MRS - Materials Research Society	12 Conference Proceedings AirSentinel: a real-time bioaerosol monitor Call, C. J., Merrill, E. L. SPIE - The International Society of Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12