Method of surface roughness measurement based on interferometry

Author(s):

• X. F. Zhang ( Harbin Engineering Univ. (China) )
• Z. P. Wang ( Harbin Engineering Univ. (China) )
• Y. E. Zhang ( Harbin Engineering Univ. (China) )
• L. H. Wang ( Harbin Engineering Univ. (China) )
• Y. M. Zhang ( Harbin Engineering Univ. (China) )

Publication title:

Fundamental Problems of Optoelectronics and Microelectronics III

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6595

Pub. Year:

2007

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819467270 [0819467278]

Language:

English

Call no.:

P63600/6595

Type:

Conference Proceedings