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Ablation of inorganic materials using laser plasma soft X-rays

Author(s):
  • T. Makimura ( Univ. of Tsukuba (Japan) )
  • T. Fujimori ( Univ. of Tsukuba (Japan) )
  • S. Uchida ( Univ. of Tsukuba (Japan) )
  • K. Murakami ( Univ. of Tsukuba (Japan) )
  • H. Niino ( Photonics Research Institute, National Institute of Advanced Industrial Science and Technology (Japan) )
Publication title:
Damage to VUV, EUV, and X-ray optics : 18-19 April 2007,Prague, Czech Republic
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6586
Pub. Year:
2007
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819467140 [0819467146]
Language:
English
Call no.:
P63600/6586
Type:
Conference Proceedings

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