Piezoelectric micromachined ultrasonic transducers with rectangular diaphragms for dual-frequency applications

Piezoelectric micromachined ultrasonic transducers with rectangular diaphragms for dual-frequency applications

Author(s):

C. Chao ( Hong Kong Polytechnic Univ. (Hong Kong China) )
T. Lam ( Hong Kong Polytechnic Univ. (Hong Kong China) )
K. Kwok ( Hong Kong Polytechnic Univ. (Hong Kong China) )
H. L. Chan ( Hong Kong Polytechnic Univ. (Hong Kong China) )

Publication title:

Micro(MEMS) and nanotechnologies for defense and security : 10-12 April 2007, Orlando, Florida, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6556

Pub. Year:

2007

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819466785 [0819466786]

Language:

English

Call no.:

P63600/6556

Type:

Conference Proceedings

Details

TDL ID:	ZA00046863
Series ID:	PA00000029
Conf. info. (Name):	Defense, Security, and Sensing : Micro (MEMS) and Nanotechnologies for Defense and Security
Conf. info. (Number):	2007
Conf. info. (Venue):	Orlando, Florida, USA
Conf. info. (Date):	2007.04.10-2007.04.12

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