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Deflection of silicon dioxide microbridge under distributed load

Author(s):
  • H. Li ( Louisiana Tech Univ. (USA) )
  • A. Chakraborty ( Louisiana Tech Univ. (USA) )
  • X. Liu ( Louisiana Tech Univ. (USA) )
  • H. Wang ( Louisiana Tech Univ. (USA) )
  • C. Luo ( Louisiana Tech Univ. (USA) )
Publication title:
Micro(MEMS) and nanotechnologies for defense and security : 10-12 April 2007, Orlando, Florida, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6556
Pub. Year:
2007
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819466785 [0819466786]
Language:
English
Call no.:
P63600/6556
Type:
Conference Proceedings

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