Modeling of electro-statically actuated two-axis (tip-tilt) MEMS torsion micro-mirrors for laser beamsteering

Modeling of electro-statically actuated two-axis (tip-tilt) MEMS torsion micro-mirrors for laser beamsteering

Author(s):

C. L. Edwards ( Johns Hopkins Univ. Applied Physics Lab. (USA) )
B. G. Boone ( Johns Hopkins Univ. Applied Physics Lab. (USA) )
W. S. Levine ( Univ. of Maryland, College Park (USA) )
C. C. Davis ( Univ. of Maryland, College Park (USA) )

Publication title:

Sensors and systems for space applications : 9-11 April 2007, Orlando, Florida, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6555

Pub. Year:

2007

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819466778 [0819466778]

Language:

English

Call no.:

P63600/6555

Type:

Conference Proceedings

Details

TDL ID:	ZA00046862
Series ID:	PA00000029
Conf. info. (Name):	Defense, Security, and Sensing : Sensors and Systems for Space Applications
Conf. info. (Number):	2007
Conf. info. (Venue):	Orlando, Florida, USA
Conf. info. (Date):	2007.04.09-2007.04.11

Similar Items:

1 Conference Proceedings Design and development of a 329-segment tip-tilt piston mirror array for space-based adaptive optics [6113-24] Stewart, J. B., Bifano, T. G., Bierden, P., Cornelissen, S., Cook, T., Levine, B. M. SPIE - The International Society of Optical Engineering	7 Conference Proceedings Magnetically actuated MEMS scanning mirror Miller,R.A., Burr,G.W., Tai,Y.-C., Psaltis,D. SPIE-The International Society for Optical Engineering
2 Conference Proceedings Electromechanical and optical properties of torsion-mirror actuators for optical swtiching applications Wu, W.G., Li, D.C., Hao, Y.L., Yan, G.Z., Jin, S.J. SPIE-The International Society for Optical Engineering	8 Conference Proceedings Eye Torsion in Space and during Static Tilt Pre- and Post-Spaceflight Markham, C.H., Diamond, S.G. ESA Publications Division
3 Conference Proceedings Mechanical reliability of surface-micromachined self-assembling two-axis MEMS tilting mirrors Gasparyan,A., Aksyuk,V.A., Busch,P.A., Arney,S.C. SPIE-The International Society for Optical Engineering	9 Conference Proceedings Integrated modeling of a semirigid hybrid mirror and a highly actuated membrane mirror as candidates for the Next Generation Space Telescope Craig,L., Cuerden,B., Jacobson,D.N., Kissil,A., Mehle,G.V., Mosier,G.E., Nein,M.E., Page,T., Pitalo,K., Redding,D.C., … SPIE - The International Society for Optical Engineering
4 Conference Proceedings Fast-steering two-axis tilt mirror for laser pointing and scanning Hafez,M., Sidler,T.C. SPIE - The International Society for Optical Engineering	10 Conference Proceedings MEMS-activated mirrors for arming and safing in optical firing sets [6287-06] Schmitt R. L., Do B. T., Davis C. L., Reicher D., Peplinski S. Z. SPIE - The International Society of Optical Engineering
5 Conference Proceedings Compact large-stroke piston tip-tilt actuator and mirror W. Noell, A. Hugi, T. Overstolz, R. Stanley, S. Waldis, N. F. de Rooij SPIE - The International Society of Optical Engineering	11 Conference Proceedings Failure analysis of radio frequency (rf) micro-electro-mechanical systems (MEMS) Walraven,J.A., Cole Jr.,E.I., Sloan,L.R., Hietala,S.L., Tigges,C.P., Dyck,C.W. SPIE-The International Society for Optical Engineering
6 Conference Proceedings Single two-axis micromachined tilt mirror and linear array Whitley, M., Hammer, J.A., Hao, Z., Wingfield, B., Nelson, L. SPIE-The International Society for Optical Engineering	12 Conference Proceedings Mounting a deformable mirror onto a controllable tip/tilt platform Wilcox, C.C., Restaino, S.R., Andrews, J.R., Payne, D.M., Teare, S.W. SPIE - The International Society of Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12