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Successful MWIR FPA fabrication using gas cluster ion-beam InSb surface finishing

Author(s):
L. P. Allen ( Galaxy Compound Semiconductors, Inc. (USA) )
G. Dallas ( Galaxy Compound Semiconductors, Inc. (USA) )
K. Blanchet ( Galaxy Compound Semiconductors, Inc. (USA) )
S. R. Vangala ( Univ. of Massachusetts/Lowell (USA) )
C. Santeufemio ( Univ. of Massachusetts/Lowell (USA) )
W. D. Goodhue ( Univ. of Massachusetts/Lowell (USA) )
E. Roehl ( Lockheed-Martin - Santa Barbara Focalplane (USA) )
C. E. Jones ( Lockheed-Martin - Santa Barbara Focalplane (USA) )
J. Barton ( Indigo Systems Corp. (USA) )
B. Zide ( Epion Corp. (USA) )
V. Difilippo ( Epion Corp. (USA) )
K. S. Jones ( Univ. of Florida (USA) )
7 more
Publication title:
Infrared technology and applications XXXIII : 9-13 April 2007, Orlando, Florida, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6542
Pub. Year:
2007
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819466648 [0819466646]
Language:
English
Call no.:
P63600/6542
Type:
Conference Proceedings

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