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Electrical test structures for the characterisation of optical proximity correction

Author(s):
A. Tsiamis ( The Univ. of Edinburgh (United Kingdom) )
S. Smith ( The Univ. of Edinburgh (United Kingdom) )
M. McCallum ( Nikon Precision Europe GmbH (United Kingdom) )
A. C. Hourd ( Compugraphics International Ltd. (United Kingdom) )
J. T. M. Stevenson ( The Univ. of Edinburgh (United Kingdom) )
A. J. Walton ( The Univ. of Edinburgh (United Kingdom) )
1 more
Publication title:
EMLC 2007 : 23rd european mask and lithography conference : 22-25 January 2007, Grenoble, France
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6533
Pub. Year:
2007
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819466556 [0819466557]
Language:
English
Call no.:
P63600/6533
Type:
Conference Proceedings

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