A MEMS vibration sensor based on Mach Zehnder interferometers

A MEMS vibration sensor based on Mach Zehnder interferometers

Author(s):

T. Ma ( Univ. of Hawaii at Manoa (USA) )
W. Zhao ( Global Communication Semiconductor (USA) )
J. Liu ( Univ. of Hawaii at Manoa (USA) and Chongqing Univ. (China) )

Publication title:

Sensors and smart structures, technologies for civil, mechanical, and aerospace systems

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6529

Pub. Year:

2007

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819466501 [0819466506]

Language:

English

Call no.:

P63600/6529

Type:

Conference Proceedings

Details

TDL ID:	ZA00046836
Series ID:	PA00000029
Conf. info. (Name):	Smart Structures : Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems
Conf. info. (Number):	2007
Conf. info. (Venue):	San Diego, CA, USA
Conf. info. (Date):	2007.03.19-2007.03.22

Similar Items:

1 Conference Proceedings Silicon-on-insulator-based photonic-crystal Mach-Zehnder interferometers [6128-38] Gu, L., Jiang, Y., Jiang, W., Chen, X., Choi J H, Chen R T SPIE - The International Society of Optical Engineering	7 Conference Proceedings Optimization design of Mach-Zehnder interferometer and its application in a fiber Bragg grating phase sensor demodulation Feng,D., Liu,Z., Zhang,W., Kai,G., Dong,X. SPIE-The International Society for Optical Engineering
2 Conference Proceedings Distributed fiber optic perturbation locating sensor based on dual Mach-Zehnder interferometer G. Luo, C. Zhang, L. Li, Z. Ma, T. Lan Society of Photo-optical Instrumentation Engineers	8 Conference Proceedings Distributed fiber-optic sensor with a ring Mach-Zehnder interferometer Q. Sun, D. Liu, H. Liu, P. Shum Society of Photo-optical Instrumentation Engineers
3 Conference Proceedings Distributed disturbance sensor based on a novel Mach-Zehnder interferometer with a fiber- loop [6344-20] Sun, Q., Liu, D., Liu, H., He, Y., Yuan, J. SPIE - The International Society of Optical Engineering	9 Conference Proceedings All-optical wavelength conversion using an SOA-based fiber ring laser and an asymmetric Mach-Zehnder interferometer Wang, L., Liu, J., Huang, Z. SPIE - The International Society of Optical Engineering
4 Conference Proceedings Sensitive current sensing base on all-fiber Mach-Zehnder interferometer Tong, Z.R., Huang, Y.L., Yang, S.Q., Feng, D.J., Kai, G.Y., Zhao,Q., Dong, X.Y. SPIE-The International Society for Optical Engineering	10 Conference Proceedings A novel fiber optic interferometer of hydrophone based on Mach-Zehnder hybrid configuration [6189-82] Chen M.-H, Chang K.-S, Lin W.-W, Chen H.-Y, Liu S.-X SPIE - The International Society of Optical Engineering
5 Conference Proceedings A novel OADM based on FBG and Mach-Zehnder interferometer Huang, Y., Dong, X., Li, J. SPIE - The International Society of Optical Engineering	11 Conference Proceedings Novel white-light interferometer using an electronically scanned Mach-Zehnder interferometer R.H. Marshall, Y.N. Ning, X.Q. Jiang, A.W. Palmer, B.T. Meggitt Society of Photo-optical Instrumentation Engineers
6 Conference Proceedings Glass-based integrated optic pressure sensors with a Mach-Zehnder interferometer and with an intermodal interferometer Ohkawa,M., Nishiwaki,C., Hasebe,K., Sekine,S., Sato,T. SPIE - The International Society for Optical Engineering	12 Conference Proceedings A novel distributed sensor using long-distance Mach-Zehnder interferometer C. Zhan, Y. Zhan, J. Wang, Q. Sun, J. Yuan Society of Photo-optical Instrumentation Engineers

1

2

3

4

5

6

7

8

9

10

11

12