Scanner-characteristics-aware OPC modeling and correction

Author(s):

• J. K. Tyminski ( Nikon Precision, Inc. (USA) )
• Q. Zhang ( Synopsys, Inc. (USA) )
• K. Lucas ( Synopsys, Inc. (USA) )
• L. Depre ( Synopsys, Inc. (France) )
• P. VanAdrichem ( Synopsys, Inc. (USA) )

Publication title:

Design for manufacturability through design-process integration : 28 February-2 March 2007, San Jose, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6521

Pub. Year:

2007

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819466402 [0819466409]

Language:

English

Call no.:

P63600/6521

Type:

Conference Proceedings