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Hardware verification of litho-friendly design (LfD) methodologies

Author(s):
R. Marz ( Infineon Technologies AG (Germany) )
K. Peter ( Infineon Technologies AG (Germany) )
S. Grondahl ( Infineon Technologies AG (Germany) )
K. Keiner ( Infineon Technologies AG (Germany) )
B. I. Choi ( Chartered Semiconductor Manufacturing, Ltd. (Singapore) )
S. F. Quek ( Chartered Semiconductor Manufacturing, Ltd. (Singapore) )
M. C. Yeo ( Chartered Semiconductor Manufacturing, Ltd. (Singapore) )
N. S. Chen ( Chartered Semiconductor Manufacturing, Ltd. (Singapore) )
S. M. Goh ( Chartered Semiconductor Manufacturing, Ltd. (Singapore) )
4 more
Publication title:
Design for manufacturability through design-process integration : 28 February-2 March 2007, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6521
Pub. Year:
2007
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819466402 [0819466409]
Language:
English
Call no.:
P63600/6521
Type:
Conference Proceedings

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