Polarization properties of state-of-art lithography optics represented by first canonical coordinate of Lie group

Author(s):

T. Fujii ( Nikon Corp. (Japan) )

Y. Kudo ( Nikon Corp. (Japan) )

Y. Ohmura ( Nikon Corp. (Japan) )

K. Suzuki ( Nikon Corp. (Japan) )

J. Kogo ( Nikon Corp. (Japan) )

Y. Mizuno ( Nikon Corp. (Japan) )

N. Kita ( Nikon Corp. (Japan) )

M. Sawada ( Nikon System (Japan) )

3 more

Publication title:

Optical microlithography XX

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6520

Pub. Year:

2007

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819466396 [0819466395]

Language:

English

Call no.:

P63600/6520

Type:

Conference Proceedings