Sub-k1 = 0.25 lithography with double patterning technique for 45-nm technology node flash memory devices at λ= 193nm
- Author(s):
G. Capetti ( STMicroelectronics (Italy) ) P. Cantu ( STMicroelectronics (Italy) ) E. Galassini ( STMicroelectronics (Italy) ) A. V. Pret ( STMicroelectronics (Italy) ) C. Turco ( STMicroelectronics (Italy) ) A. Vaccaro ( STMicroelectronics (Italy) ) P. Rigolli ( STMicroelectronics (Italy) ) F. D'Angelo ( STMicroelectronics (Italy) ) G. Cotti ( STMicroelectronics (Italy) ) - Publication title:
- Optical microlithography XX
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6520
- Pub. Year:
- 2007
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819466396 [0819466395]
- Language:
- English
- Call no.:
- P63600/6520
- Type:
- Conference Proceedings
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