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Mechanism of immersion specific defects with high receding-angle topcoat

Author(s):
M. Terai ( Mitsubishi Electric Corp. (Japan) )
T. Kumada ( Mitsubishi Electric Corp. (Japan) )
T. Ishibashi ( Renesas Technology Corp. (Japan) )
T. Hagiwara ( Renesas Technology Corp. (Japan) )
T. Hanawa ( Renesas Technology Corp. (Japan) )
T. Ando ( Tokyo Ohka Kogyo Co., Ltd. (Japan) )
T. Matsunobe ( Toray Research Ctr. Inc. (Japan) )
K. Okada ( Toray Research Ctr. Inc. (Japan) )
Y. Muraji ( Toray Research Ctr. Inc. (Japan) )
K. Yoshikawa ( Toray Research Ctr. Inc. (Japan) )
N. Man ( Toray Research Ctr. Inc. (Japan) )
6 more
Publication title:
Advances in resist materials and processing technology XXIV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6519
Pub. Year:
2007
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819466389 [0819466387]
Language:
English
Call no.:
P63600/6519
Type:
Conference Proceedings

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