Impact of curing kinetics and materials properties on imprint characteristics of resists for UV nano-imprint lithography
- Author(s):
F. A. Houle ( IBM Almaden Research Ctr. (USA) ) A. Fornof ( IBM Almaden Research Ctr. (USA) ) R. Sooriyakumaran ( IBM Almaden Research Ctr. (USA) ) H. Truong ( IBM Almaden Research Ctr. (USA) ) D. C. Miller ( IBM Almaden Research Ctr. (USA) ) M. I. Sanchez ( IBM Almaden Research Ctr. (USA) ) B. Davis ( IBM Almaden Research Ctr. (USA) ) T. Magbitang ( IBM Almaden Research Ctr. (USA) ) R. D. Allen ( IBM Almaden Research Ctr. (USA) ) M. W. Hart ( IBM Almaden Research Ctr. (USA) ) G. Dubois ( IBM Almaden Research Ctr. (USA) ) - Publication title:
- Advances in resist materials and processing technology XXIV
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6519
- Pub. Year:
- 2007
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819466389 [0819466387]
- Language:
- English
- Call no.:
- P63600/6519
- Type:
- Conference Proceedings
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