Performance of chemically amplified resists at half-pitch of 45 nm and below
- Author(s):
Y. Wei ( Qimonda North America Corp. (USA) ) M. Bender ( Qimonda Dresden GmbH & Co. OHG (Germany) ) W. Domke ( Qimonda AG (Germany) ) A. Laessig ( Qimonda Dresden GmbH & Co. OHG (Germany) ) M. Sebald ( Qimonda AG (Germany) ) S. Trogisch ( Qimonda Dresden GmbH & Co. OHG (Germany) ) D. Back ( Qimonda North America Corp. (USA) ) - Publication title:
- Advances in resist materials and processing technology XXIV
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6519
- Pub. Year:
- 2007
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819466389 [0819466387]
- Language:
- English
- Call no.:
- P63600/6519
- Type:
- Conference Proceedings
Similar Items:
SPIE - The International Society of Optical Engineering |
7
Conference Proceedings
Application of e-beam chemically amplified resist to devices below 0.18-μm node
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
4
Conference Proceedings
Fabrication of Sub-0.1 um Contacts with 193 nm CARL Photo- Lithography by a Combination of ICP Dry Development and MORI HDP Oxide Etch
Electrochemical Society |
SPIE - The International Society of Optical Engineering |
5
Conference Proceedings
Effects of photo resist erosion in development on critical dimension performance for 45nm node and below
Society of Photo-optical Instrumentation Engineers |
11
Conference Proceedings
Comparative evaluation of positive and negative chemically amplified resist characteristics for 90-nm-node photomask production
SPIE-The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |