Blank Cover Image

Implementation strategies and return on investment for integrated CD control

Author(s):
Publication title:
Metrology, inspection, and process control for microlithography XXI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6518
Pub. Year:
2007
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819466372 [0819466379]
Language:
English
Call no.:
P63600/6518
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Characterization of integrated optical CD for process control

Yu, J., Uchida, J., van Dommelen, Y., Carpaij, R., Cheng, S., Pollentier, I., Viswanathan, A., Lane, L., Barry, K.A., …

SPIE - The International Society of Optical Engineering
7 Conference Proceedings HIGH RETURN CONTROL STRATEGIES FOR PVC BATCH POLYMERIZATION

Dybeck, Martin

American Institute of Chemical Engineers
2 Conference Proceedings Submicron calibration strategy for CD control

Chain,E.E., Kulkens,L., Harris,T.A.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings Implementation and performance evaluation of a network-attached CD image file server

Wu, J.L., Dong, Y.G., Sun, Z.Y., Jia, H.B.

SPIE-The International Society for Optical Engineering
3 Conference Proceedings Ultra High Temperature Ceramics: Microstructure Control and Properties Improvement Related to Materials Design and Processing Procedures

Bellosi, A., Monteverde, F.

ESA Publications Division
9 Conference Proceedings EUROSTAR 2000 DISPOSAL ON A GRAVEYARD ORBIT: ORBIT CONTROL STRATEGY AND OPERATIONAL IMPLEMENTATION

F. Raballand, D. Mignon, J.-L. Gonnaud

ESA Publications Division
4 Conference Proceedings Features of Implementation of Investment Projects in Innovation in the Ukraine

E.A. Simson, V.B. Lyubetskya

IOS Press
10 Conference Proceedings Eurostar 2000 Disposal in a Graveyard Orbit: Orbit Control Strategy and Operational Implementation

Mignon, D., Raballand, F., Gonnaud, J. -L., Jallade, S.

ESA Publications Division
5 Conference Proceedings A Marketing Strategy for Developing Private Investment in Lunar Missions,

Higgs, L.R.A.

ESA Publications Division
11 Conference Proceedings Implementing flare compensation for EUV masks through localized mask CD resizing

Krautschik, C.G., Chandhok, M., Zhang, G., Lee, S.H., Goldstein, M., Panning, E.M., Rice, B.J., Bristol, R.L., Singh, V.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings Implementation and benefits of advanced process control for lithography CD and overlay

Zavyalova, L., Fu, C.-C., Seligman, G.S., Tapp, P.A., Pol, V.

SPIE-The International Society for Optical Engineering
12 Conference Proceedings Design and implementation of an integrated PACS workstation in the ICU

Nahmias,C., Kenyon,D.B., Tan,L., Coblentz,C.L.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12