Contact leakage and open monitoring with an advanced e-beam inspection system

Contact leakage and open monitoring with an advanced e-beam inspection system

Author(s):

S. Lei ( United Microelectronics Corp. (Taiwan) )

H. Liu ( United Microelectronics Corp. (Taiwan) )

M. Tsai ( United Microelectronics Corp. (Taiwan) )

H. Wu ( Hermes Microvision, Inc. (Taiwan) )

H. Xiao ( Hermes Microvision, Inc. USA (USA) )

J. Jau ( Hermes Microvision, Inc. USA (USA) )

1 more

Publication title:

Metrology, inspection, and process control for microlithography XXI

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6518

Pub. Year:

2007

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819466372 [0819466379]

Language:

English

Call no.:

P63600/6518

Type:

Conference Proceedings

Details

TDL ID:	ZA00046825
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Metrology, Inspection, and Process Control for Microlithography
Conf. info. (Number):	2007 : 21st
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2007.02.26-2007.03.01

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