Characterization of bending CD errors induced by resist trimming in 65 nm node and beyond
- Author(s):
Y. Gu ( Texas Instruments, Inc. (USA) ) J. B. Friedmann ( Texas Instruments, Inc. (USA) ) V. Ukraintsev ( Texas Instruments, Inc. (USA) ) G. Zhang ( Texas Instruments, Inc. (USA) ) T. Wolf ( Texas Instruments, Inc. (USA) ) T. Lii ( Texas Instruments, Inc. (USA) ) R. Jackson ( Texas Instruments, Inc. (USA) ) - Publication title:
- Metrology, inspection, and process control for microlithography XXI
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6518
- Pub. Year:
- 2007
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819466372 [0819466379]
- Language:
- English
- Call no.:
- P63600/6518
- Type:
- Conference Proceedings
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