Comparison and uncertainties of standards for critical dimension atomic force microscope tip width calibration

Comparison and uncertainties of standards for critical dimension atomic force microscope tip width calibration

Author(s):

R. Dixson ( National Institute of Standards and Technology (USA) )
N. G. Orji ( National Institute of Standards and Technology (USA) )

Publication title:

Metrology, inspection, and process control for microlithography XXI

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6518

Pub. Year:

2007

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819466372 [0819466379]

Language:

English

Call no.:

P63600/6518

Type:

Conference Proceedings

Details

TDL ID:	ZA00046825
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Metrology, Inspection, and Process Control for Microlithography
Conf. info. (Number):	2007 : 21st
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2007.02.26-2007.03.01

Similar Items:

1 Conference Proceedings Re-calibration of the NIST SRM 2059 master standard using traceable atomic force microscope metrotogy R. Dixson, J. Potzick, N. G. Orji Society of Photo-optical Instrumentation Engineers	7 Conference Proceedings Accuracy considerations for critical dimension semiconductor metrology N. G. Orji, R. G. Dixson, B. D. Bunday, J. A. Allgair Society of Photo-optical Instrumentation Engineers
2 Conference Proceedings Application of carbon nanotube probes in a critical dimension atomic force microscope B. C. Park, J. Choi, S. J. Ahn, D. Kim, J. Lyou, R. Dixson, N. G. Orji, J. Fu, T. V. Vorburger SPIE - The International Society of Optical Engineering	8 Conference Proceedings Precision carbon nanotube tip for critical dimension measurement with atomic force microscope Wies, C., Lebert, R., Jagle, B., Juschkin, L., Sobel, F., Seitz, H., Walter, R., Laubis, C., Schoize, F., Biel, W., … SPIE - The International Society of Optical Engineering
3 Conference Proceedings Photomask applications of traceable atomic force microscope dimensional metrology at NIST R. Dixson, N. G. Orji, J. Potzick, J. Fu, R. A. Allen Society of Photo-optical Instrumentation Engineers	9 Conference Proceedings Measurement of pitch and width samples with the NIST calibrated atomic force microscope Dixson,R., Koning,R., Vorburger,T.V., Fu,J., Tsai,V.W. SPIE-The International Society for Optical Engineering
4 Conference Proceedings Traceable atomic force microscope dimensional metrology at NIST [6152-25] Dixson, R., Orji, N. G., Fu, J., Cresswell, M., Allen, R., Guthrie, W. SPIE - The International Society of Optical Engineering	10 Conference Proceedings Dimensional metrology with the NIST calibrated atomic force microscope Ronald G. Dixson, Rainer G. Koening, Vincent W. Tsai, Joseph Fu, Theodore V. Vorburger SPIE - The International Society of Optical Engineering
5 Conference Proceedings TEM calibration methods for critical dimension standards N. G. Orji, R. G. Dixson, D. I. Garcia-Gutierrez, B. D. Bunday, M. Bishop, M. W. Cresswell, R. A. Allen, J. A. Allgair SPIE - The International Society of Optical Engineering	11 Conference Proceedings Progress on accurate metrology of pitch, height, roughness, and width artifacts using an atomic force microscope J. Schneir, T.H. McWaid, R. Dixson, V.W. Tsai Society of Photo-optical Instrumentation Engineers
6 Conference Proceedings Single crystal critical dimension reference materials (SCCDRM): process optimization for the next generation of standards R. G. Dixson, W. F. Guthrie, M. Cresswell, R. A. Allen, N. G. Orji SPIE - The International Society of Optical Engineering	12 Conference Proceedings Accurate dimensional metrology with atomic force microscopy Dixson,R.G., Koning,R., Fu,J., Vorburger,T.V., Renegar,B.T. SPIE - The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12