Single crystal critical dimension reference materials (SCCDRM): process optimization for the next generation of standards
- Author(s):
- R. G. Dixson ( National Institute of Standards and Technology (USA) )
- W. F. Guthrie ( National Institute of Standards and Technology (USA) )
- M. Cresswell ( National Institute of Standards and Technology (USA) )
- R. A. Allen ( National Institute of Standards and Technology (USA) )
- N. G. Orji ( National Institute of Standards and Technology (USA) )
- Publication title:
- Metrology, inspection, and process control for microlithography XXI
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6518
- Pub. Year:
- 2007
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819466372 [0819466379]
- Language:
- English
- Call no.:
- P63600/6518
- Type:
- Conference Proceedings
Similar Items:
SPIE - The International Society of Optical Engineering |
7
Conference Proceedings
Photomask applications of traceable atomic force microscope dimensional metrology at NIST
Society of Photo-optical Instrumentation Engineers |
SPIE - The International Society of Optical Engineering |
8
Conference Proceedings
Progress on implementation of a CD-AFM・based reference measurement system [6152-24]
SPIE - The International Society of Optical Engineering |
3
Conference Proceedings
Comparison and uncertainties of standards for critical dimension atomic force microscope tip width calibration
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
4
Conference Proceedings
Re-calibration of the NIST SRM 2059 master standard using traceable atomic force microscope metrotogy
Society of Photo-optical Instrumentation Engineers |
10
Conference Proceedings
Application of carbon nanotube probes in a critical dimension atomic force microscope
SPIE - The International Society of Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
11
Conference Proceedings
Comparison of properties of electrical test structures patterned in BESOI and SIMOX films for CD reference-material applications
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |