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Physical matching versus CD matching for CD SEM

Author(s):
R. Kris ( Applied Materials Israel (Israel) )
G. Zuckerman ( Applied Materials Israel (Israel) )
E. Sommer ( Applied Materials Israel (Israel) )
Z. Hadad ( Applied Materials Israel (Israel) )
S. Dror ( Applied Materials Israel (Israel) )
A. Tam ( Applied Materials Israel (Israel) )
N. Shcolnik ( Applied Materials Israel (Israel) )
2 more
Publication title:
Metrology, inspection, and process control for microlithography XXI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6518
Pub. Year:
2007
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819466372 [0819466379]
Language:
English
Call no.:
P63600/6518
Type:
Conference Proceedings

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