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Overlay metrology tool calibration

Author(s):
L. A. Binns ( Nanometrics, Inc. (USA) )
P. Dasari ( Nanometrics, Inc. (USA) )
N. P. Smith ( Nanometrics, Inc. (USA) )
G. Ananew ( Nanometrics, Inc. (USA) )
H. Fink ( Nanometrics, Inc. (USA) )
C. P. Ausschnitt ( IBM SRDC (USA) )
J. Morningstar ( IBM SRDC (USA) )
C. Thomison ( IBM SRDC (USA) )
R. J. Yerdon ( IBM SRDC (USA) )
4 more
Publication title:
Metrology, inspection, and process control for microlithography XXI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6518
Pub. Year:
2007
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819466372 [0819466379]
Language:
English
Call no.:
P63600/6518
Type:
Conference Proceedings

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