Effect of deposition, sputtering, and evaporation of lithium debris buildup on EUV optics
- Author(s):
M. J. Neumann ( Univ. of Illinois at Urbana-Champaign (USA) ) M. Cruce ( Univ. of Illinois at Urbana-Champaign (USA) ) P. Brown ( Univ. of Illinois at Urbana-Champaign (USA) ) S. N. Srivasta ( Univ. of Illinois at Urbana-Champaign (USA) ) D. N. Ruzic ( Univ. of Illinois at Urbana-Champaign (USA) ) O. Khodykin ( Cymer (USA) ) - Publication title:
- Emerging lithographic technologies XI
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6517
- Pub. Year:
- 2007
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819466365 [0819466360]
- Language:
- English
- Call no.:
- P63600/6517
- Type:
- Conference Proceedings
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