Status and path to a final EUVL reticle-handling solution
- Author(s):
L. He ( SEMATECH North (USA) ) K. Orvek ( SEMATECH North (USA) ) P. Seidel ( SEMATECH (USA) ) S. Wurm ( SEMATECH (USA) ) J. Underwood ( SEMATECH North (USA) ) E. Betancourt ( SEMATECH North (USA) ) - Publication title:
- Emerging lithographic technologies XI
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6517
- Pub. Year:
- 2007
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819466365 [0819466360]
- Language:
- English
- Call no.:
- P63600/6517
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Status of EUV reticle handling solution in meeting 32 nm HP EUV lithography
Society of Photo-optical Instrumentation Engineers |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
9
Conference Proceedings
Lithographic characterization of improved projection optics in the EUVL engineering test stand
SPIE-The International Society for Optical Engineering |
4
Conference Proceedings
Clean mask shipping module development and demonstration for EUVL masks and blanks [6283-97]
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
12
Conference Proceedings
EUVL mask dual pods to be used for mask shipping and handling in exposure tools
SPIE - The International Society of Optical Engineering |