Technology mapping technique for enhancing throughput of multi-column-cell systems

Technology mapping technique for enhancing throughput of multi-column-cell systems

Author(s):

M. Sugihara ( ISIT (Japan) )
Y. Matsunaga ( Kyushu Univ. (Japan) )
K. Murakami ( Kyushu Univ. (Japan) )

Publication title:

Emerging lithographic technologies XI

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6517

Pub. Year:

2007

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819466365 [0819466360]

Language:

English

Call no.:

P63600/6517

Type:

Conference Proceedings

Details

TDL ID:	ZA00046824
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Emerging Lithographic Technologies
Conf. info. (Number):	2007 : 11th
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2007.02.27-2007.03.01

Similar Items:

1 Conference Proceedings Technology mapping technique for throughput enhancement of character projection equipment [6151-36] Sugihara, M., Takata, T., Nakamura, K., Inanami, R., Hayashi, H., Kishimoto, K., Hasebe, T., Kawano, Y., Matsunaga, Y., … SPIE - The International Society of Optical Engineering	7 Conference Proceedings New registration technique using voltage-contrast images for low-energy electron-beam lithography Nakasugi,T., Ando,A., Sugihara,K., Miyoshi,M., Okumura,K. SPIE-The International Society for Optical Engineering
2 Conference Proceedings CP mask optimization for enhancing the throughput of MCC systems [6349-166] Sugihara, M., Nakamura, K., Matsunaga, Y., Murakami, K. SPIE - The International Society of Optical Engineering	8 Conference Proceedings E-beam exposure system using multi column cell (MCC) with CP for mask writing A. Yamada, H. Yasuda, M. Yamabe Society of Photo-optical Instrumentation Engineers
3 Conference Proceedings A CP mask development methodology for MCC systems [6283-90] Sugihara, M., Takata, T., Nakamura, K., Matsunaga, Y., Murakami, K. SPIE - The International Society of Optical Engineering	9 Conference Proceedings Pattern-data preparation method to enchance high-throughput mask fabrication in variable-shaped e-beam writing system Hara,S., Murakami,E., Magoshi,S., Koyama,K., Anze,H., Ogawa,Y., Kabeya,A., Ooki,S., Saito,T., Fujii,T., Sakamoto,S., … SPIE-The International Society for Optical Engineering
4 Conference Proceedings Multi column cell (MCC) e-beam exposure system for mask writing H. Yasuda, A. Yamada, M. Yamabe Society of Photo-optical Instrumentation Engineers	10 Conference Proceedings The development of a high-resolution HMD with a wide FOV using the shuttle optical system K. Inoguchi, M. Matsunaga, S. Yamazaki Society of Photo-optical Instrumentation Engineers
5 Conference Proceedings Development of an urban thermal environment measurement system using a new spherical thermography technique Asano,K., Hoyano,A., Matsunaga,T. SPIE-The International Society for Optical Engineering	11 Conference Proceedings High-throughput photovoltaic cell characterization system V. Kochergin, Z. Shi, K. Dobson Society of Photo-optical Instrumentation Engineers
6 Conference Proceedings Compositions and Properties of Pyrochlore-Type Oxides for Air Electrode in Secondary Cells K. Koga, T. Momai, M. Matsunaga Electrochemical Society	12 Conference Proceedings Two-dimensional wavelet mapping techniques for damage detection in structural systems Amizic, B., Amaravadi, V.K., Rao, V.S., Derriso, M.M. SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12