EUV source development for high-volume chip manufacturing tools
- Author(s):
U. Stamm ( XTREME technologies (Germany) ) M. Yoshioka ( XTREME technologies (Germany) ) J. Kleinschmidt ( XTREME technologies (Germany) ) C. Ziener ( XTREME technologies (Germany) ) G. Schriever ( XTREME technologies (Germany) ) M. C. Schurmann ( XTREME technologies (Germany) ) G. Hergenhan ( XTREME technologies (Germany) ) V. M. Borisov ( SRC RF TRINITI (Russia) ) - Publication title:
- Emerging lithographic technologies XI
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6517
- Pub. Year:
- 2007
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819466365 [0819466360]
- Language:
- English
- Call no.:
- P63600/6517
- Type:
- Conference Proceedings
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