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Inductively coupled plasma etching of ZnO

Author(s):
  • K. J. Nordheden ( Univ. of Kansas (USA) )
  • M. Dineen ( Oxford Instruments Plasma Technology (United Kingdom) )
  • C. Welch ( Oxford Instruments Plasma Technology (United Kingdom) )
Publication title:
Zinc oxide materials and devices II : 21-24 January, 2007, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6474
Pub. Year:
2007
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819465870 [0819465879]
Language:
English
Call no.:
P63600/6474
Type:
Conference Proceedings

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