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The iMoD display: considerations and challenges in fabricating MOEMS on large area glass substrates

Author(s):
C. Chui ( QUALCOMM MEMS Technologies, Inc. (USA) )
P. D. Floyd ( QUALCOMM MEMS Technologies, Inc. (USA) )
D. Heald ( QUALCOMM MEMS Technologies, Inc. (USA) )
B. Arbuckle ( QUALCOMM MEMS Technologies, Inc. (USA) )
A. Lewis ( QUALCOMM MEMS Technologies, Inc. (USA) )
M. Kothari ( QUALCOMM MEMS Technologies, Inc. (USA) )
B. Cummings ( QUALCOMM MEMS Technologies, Inc. (USA) )
L. Palmateer ( QUALCOMM MEMS Technologies, Inc. (USA) )
J. Bos ( QUALCOMM MEMS Technologies Taiwan, Ltd. (Taiwan) )
D. Chang ( QUALCOMM MEMS Technologies Taiwan, Ltd. (Taiwan) )
J. Chiang ( QUALCOMM MEMS Technologies Taiwan, Ltd. (Taiwan) )
L.-M. Wang ( QUALCOMM MEMS Technologies Taiwan, Ltd. (Taiwan) )
E. Pao ( QUALCOMM MEMS Technologies Taiwan, Ltd. (Taiwan) )
F. Su ( QUALCOMM MEMS Technologies Taiwan, Ltd. (Taiwan) )
V. Huang ( QUALCOMM MEMS Technologies Taiwan, Ltd. (Taiwan) )
W.-J. Lin ( Prime View International Co., Ltd. (Taiwan) )
W.-C. Tang ( Prime View International Co., Ltd. (Taiwan) )
J.-J. Yeh ( Prime View International Co., Ltd. (Taiwan) )
C.-C. Chan ( Prime View International Co., Ltd. (Taiwan) )
F.-A. Shu ( Prime View International Co., Ltd. (Taiwan) )
Y.-D. Ju ( Prime View International Co., Ltd. (Taiwan) )
16 more
Publication title:
MOEMS and miniaturized systems VI : 24-25 January 2007, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6466
Pub. Year:
2007
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819465795 [0819465798]
Language:
English
Call no.:
P63600/6466
Type:
Conference Proceedings

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