Creation of embedded structures in SU-8

Creation of embedded structures in SU-8

Author(s):

J. M. Dykes ( Simon Fraser Univ. (Canada) )

D. K. Poon ( Simon Fraser Univ. (Canada) )

J. Wang ( Simon Fraser Univ. (Canada) )

D. Sameoto ( Simon Fraser Univ. (Canada) )

J. T. K. Tsui ( Simon Fraser Univ. (Canada) )

C. Choo ( Simon Fraser Univ. (Canada) )

G. H. Chapman ( Simon Fraser Univ. (Canada) )

A. M. Parameswaren ( Simon Fraser Univ. (Canada) )

B. L. Gray ( Simon Fraser Univ. (Canada) )

4 more

Publication title:

Microfluidics, bioMEMS, and medical microsystems V : 22-24 January 2007, San Jose, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6465

Pub. Year:

2007

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819465788 [081946578X]

Language:

English

Call no.:

P63600/6465

Type:

Conference Proceedings

Details

TDL ID:	ZA00046773
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : Microfluidics, BioMEMS, and Medical Microsystems
Conf. info. (Number):	2007 : 5th
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2007.01.22-2007.01.24

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