Development of a model for predicting dry stiction in microelectromechanical systems (MEMS)

Development of a model for predicting dry stiction in microelectromechanical systems (MEMS)

Author(s):

A. Hariri ( Univ. of Toronto (Canada) )
J. W. Zu ( Univ. of Toronto (Canada) )
R. Ben Mrad ( Univ. of Toronto (Canada) )

Publication title:

Reliability, packaging, testing, and characterization of MEMS/MOEMS VI : 23-24 January, 2007, San Jose, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6463

Pub. Year:

2007

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819465764 [0819465763]

Language:

English

Call no.:

P63600/6463

Type:

Conference Proceedings

Details

TDL ID:	ZA00046771
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS
Conf. info. (Number):	2007 : 6th
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2007.01.23-2007.01.24

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