Hybrid approach to MEMS reliability assessment

Author(s):

• J. L. Zunino III ( U.S. Army RDE Command(USA) )
• D. R. Skelton ( WPI-ME (USA) )
• W. Han ( WPI-ME (USA) )
• R. J. Pryputniewicz ( WPI-ME (USA) )

Publication title:

Reliability, packaging, testing, and characterization of MEMS/MOEMS VI : 23-24 January, 2007, San Jose, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6463

Pub. Year:

2007

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819465764 [0819465763]

Language:

English

Call no.:

P63600/6463

Type:

Conference Proceedings