Verification of thin film processes in a virtual fabrication environment
- Author(s):
T. Schmidt ( Univ. of Siegen (Germany) ) D. Ortloff ( Process Relations GmbH (Germany) ) J. Popp ( Process Relations GmbH (Germany) ) K. Hahn ( Univ. of Siegen (Germany) ) R. Bruck ( Univ. of Siegen (Germany) ) A. Hossinger ( Silvaco Technology Ctr. (United Kingdom) ) - Publication title:
- Micromachining technology for micro-optics and nano-optics V and microfabrication process technology XII : 22-24 January 2007, San Jose, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6462
- Pub. Year:
- 2007
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819465757 [0819465755]
- Language:
- English
- Call no.:
- P63600/6462
- Type:
- Conference Proceedings
Similar Items:
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |