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Verification of thin film processes in a virtual fabrication environment

Author(s):
T. Schmidt ( Univ. of Siegen (Germany) )
D. Ortloff ( Process Relations GmbH (Germany) )
J. Popp ( Process Relations GmbH (Germany) )
K. Hahn ( Univ. of Siegen (Germany) )
R. Bruck ( Univ. of Siegen (Germany) )
A. Hossinger ( Silvaco Technology Ctr. (United Kingdom) )
1 more
Publication title:
Micromachining technology for micro-optics and nano-optics V and microfabrication process technology XII : 22-24 January 2007, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6462
Pub. Year:
2007
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819465757 [0819465755]
Language:
English
Call no.:
P63600/6462
Type:
Conference Proceedings

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