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Pulse-width dependency of the fabricating resolution of the two-photon absorption photo-polymerization

Author(s):
H. J. Kong ( KAIST (South Korea) )
S. W. Yi ( KAIST (South Korea) )
D. Yang ( KAIST (South Korea) )
K. Lee ( Hannam Univ. (South Korea) )
J. Kim ( KAIST (South Korea) )
T. Lim ( KAIST (South Korea) )
S. Kim ( KAIST (South Korea) )
2 more
Publication title:
Micromachining technology for micro-optics and nano-optics V and microfabrication process technology XII : 22-24 January 2007, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6462
Pub. Year:
2007
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819465757 [0819465755]
Language:
English
Call no.:
P63600/6462
Type:
Conference Proceedings

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