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Fabrication processes of MEMS phase shifters on polymer-based substrates

Author(s):
J. Wang ( Univ. of Texas at Arlington (USA) )
T. Ativanichayaphong ( Univ. of Texas at Arlington (USA) )
Y. Cai ( Univ. of Texas at Arlington (USA) )
W.-D. Huang ( Univ. of Texas at Arlington (USA) )
L.-C. Hsu ( Univ. of Texas at Arlington (USA) )
W. A. Davis ( Univ. of Texas at Arlington (USA) )
M. Chiao ( Univ. of British Columbia (Canada) )
J.-C. Chiao ( Univ. of Texas at Arlington (USA) )
3 more
Publication title:
Micro- and nanotechnology : materials, processes, packaging, and systems III : 11-13 December 2006, Adelaide, Australia
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6415
Pub. Year:
2007
Paper no.:
641515
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819465238 [0819465232]
Language:
English
Call no.:
P63600/6415
Type:
Conference Proceedings

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